DALIAN UNIVERSITY OF TECHNOLOGY
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Professor Supervisor of Doctorate Candidates Supervisor of Master's Candidates
Research Projects
半导体先进封装工艺中射频偏置电压稳定性控制研究, 2017/06/26-2020/06/30, 结题
高参数小型微波电子回旋共振等离子体源研究, 2016/09/01-2020/06/30, 结题
大气压脉冲射频放电中斑图特性和斑图-辉光转化研究, 2014/09/01, 结题
偏滤器等离子体中杂质行为及原子分子物理过程, 2010/03/30-2013/05/31, 结题
常压脉冲射频辉光等离子体中的物理机理与稳定控制研究, 2008/09/25-2012/12/31, 结题
射频感性耦合等离子体中与容性耦合有关的问题研究, 2006/09/25-2009/12/31, 结题
面向ITER的壁监测和杂质循环的在线动态行为研究, 2018/08/01-2024/07/05, 结题
射频离子源放电异常现象分析研究, 2018/07/16-2020/12/30, 撤销
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